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Optical properties of ITO/TiO2 single and double layer thin films deposited by RPLAD

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Optical properties of ITO/TiO2 single and double layer thin films deposited by RPLAD

Auteurs : RBID : Pascal:10-0200804

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Abstract

Indium tin oxide (ITO) and titanium dioxide (TiO2) single layer and double layer ITO/TiO2 films were prepared using reactive pulsed laser ablation deposition (RPLAD) with an ArF excimer laser for applications in dye-sensitized solar cells (DSSCs). The films were deposited on SiO2 substrates either at room temperatures (RT) or heated to 200-400 °C. Under optimized conditions, transmission of ITO films in the visible (vis) range was above 89% for films produced at RT and 93% for the ones deposited at higher temperatures. Increasing the substrate temperature from RT to 400 °C enhances the transmission of TiO2 films in the vis-NIR from about 70% to 92%. High transmission (≃90%) was observed for the double layer ITO/TiO2 with a transmission cut-off above 900 nm. From the transmission data, the energies gaps (Eg), as well as the refractive indexes (n) for the films were estimated. n ≃ 2.03 and 2.04, respectively for ITO films and TiO2 film deposited at 400 °C in the visible region. Post-annealing of the TiO2 films for 3 h at 300 and 500 °C was performed to enhance n. The refractive index of the TiO2 films increases with the post-annealing temperature. The direct band gap is 3.6, 3.74 and 3.82 eV for ITO films deposited at RT, 200, and 400 °C, respectively. The TiO2 films present a direct band gap of 3.51 and 3.37 eV for as deposited TiO2 films and when annealed at 400 °C, respectively. There is a shift of about 0.1 eV between ITO and ITO/TiO2 films deposited at 200 °C. The shift decreases by half when the TiO2 film was deposited at 400 °C. Post-annealing was also performed on double layer ITO/TiO2.

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Pascal:10-0200804

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<title xml:lang="en" level="a">Optical properties of ITO/TiO
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<term>Refractive index</term>
<term>Thin films</term>
<term>Titanium oxide</term>
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<term>Transmittance</term>
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<term>Couche double</term>
<term>Couche mince</term>
<term>Recuit</term>
<term>Facteur transmission</term>
<term>Indice réfraction</term>
<term>Bande interdite</term>
<term>Oxyde de titane</term>
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<div type="abstract" xml:lang="en">Indium tin oxide (ITO) and titanium dioxide (TiO
<sub>2</sub>
) single layer and double layer ITO/TiO
<sub>2</sub>
films were prepared using reactive pulsed laser ablation deposition (RPLAD) with an ArF excimer laser for applications in dye-sensitized solar cells (DSSCs). The films were deposited on SiO
<sub>2</sub>
substrates either at room temperatures (RT) or heated to 200-400 °C. Under optimized conditions, transmission of ITO films in the visible (vis) range was above 89% for films produced at RT and 93% for the ones deposited at higher temperatures. Increasing the substrate temperature from RT to 400 °C enhances the transmission of TiO
<sub>2</sub>
films in the vis-NIR from about 70% to 92%. High transmission (≃90%) was observed for the double layer ITO/TiO
<sub>2</sub>
with a transmission cut-off above 900 nm. From the transmission data, the energies gaps (Eg), as well as the refractive indexes (n) for the films were estimated. n ≃ 2.03 and 2.04, respectively for ITO films and TiO
<sub>2</sub>
film deposited at 400 °C in the visible region. Post-annealing of the TiO
<sub>2</sub>
films for 3 h at 300 and 500 °C was performed to enhance n. The refractive index of the TiO
<sub>2</sub>
films increases with the post-annealing temperature. The direct band gap is 3.6, 3.74 and 3.82 eV for ITO films deposited at RT, 200, and 400 °C, respectively. The TiO
<sub>2</sub>
films present a direct band gap of 3.51 and 3.37 eV for as deposited TiO
<sub>2</sub>
films and when annealed at 400 °C, respectively. There is a shift of about 0.1 eV between ITO and ITO/TiO
<sub>2</sub>
films deposited at 200 °C. The shift decreases by half when the TiO
<sub>2</sub>
film was deposited at 400 °C. Post-annealing was also performed on double layer ITO/TiO
<sub>2</sub>
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<s0>Indium tin oxide (ITO) and titanium dioxide (TiO
<sub>2</sub>
) single layer and double layer ITO/TiO
<sub>2</sub>
films were prepared using reactive pulsed laser ablation deposition (RPLAD) with an ArF excimer laser for applications in dye-sensitized solar cells (DSSCs). The films were deposited on SiO
<sub>2</sub>
substrates either at room temperatures (RT) or heated to 200-400 °C. Under optimized conditions, transmission of ITO films in the visible (vis) range was above 89% for films produced at RT and 93% for the ones deposited at higher temperatures. Increasing the substrate temperature from RT to 400 °C enhances the transmission of TiO
<sub>2</sub>
films in the vis-NIR from about 70% to 92%. High transmission (≃90%) was observed for the double layer ITO/TiO
<sub>2</sub>
with a transmission cut-off above 900 nm. From the transmission data, the energies gaps (Eg), as well as the refractive indexes (n) for the films were estimated. n ≃ 2.03 and 2.04, respectively for ITO films and TiO
<sub>2</sub>
film deposited at 400 °C in the visible region. Post-annealing of the TiO
<sub>2</sub>
films for 3 h at 300 and 500 °C was performed to enhance n. The refractive index of the TiO
<sub>2</sub>
films increases with the post-annealing temperature. The direct band gap is 3.6, 3.74 and 3.82 eV for ITO films deposited at RT, 200, and 400 °C, respectively. The TiO
<sub>2</sub>
films present a direct band gap of 3.51 and 3.37 eV for as deposited TiO
<sub>2</sub>
films and when annealed at 400 °C, respectively. There is a shift of about 0.1 eV between ITO and ITO/TiO
<sub>2</sub>
films deposited at 200 °C. The shift decreases by half when the TiO
<sub>2</sub>
film was deposited at 400 °C. Post-annealing was also performed on double layer ITO/TiO
<sub>2</sub>
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<s0>Thin films</s0>
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<s0>Annealing</s0>
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<s0>Facteur transmission</s0>
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<s0>Transmittance</s0>
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<s5>04</s5>
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<s0>Indice réfraction</s0>
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<s5>06</s5>
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<s0>Energy gap</s0>
<s5>06</s5>
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<s0>Oxyde de titane</s0>
<s5>15</s5>
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<s5>15</s5>
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<s0>O Ti</s0>
<s4>INC</s4>
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<s0>TiO2</s0>
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<s1>130</s1>
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<fN82>
<s1>OTO</s1>
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<s1>International Conference on Photo-Excited Processes and Applications (ICPEPA)</s1>
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<s3>Sapporo, Hokkaido JPN</s3>
<s4>2008-09-09</s4>
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